Growth mechanisms of hBN crystalline nanostructures with rf sputtering deposition: challenges, opportunities, and future perspectives

Authors
Duc-Quang Hoang, Ngoc-Hai Vu, Thanh-Qui Nguyen, Thanh-Dung Hoang, Xuan-Huu Cao, Dinh-Khang Pham
Publication year
2023
Index (WoS/Scopus)
WoS
Publisher
Institute of Physics Publishing
Journal
Physica Scripta
Link
https://iopscience.iop.org/article/10.1088/1402-4896/acbe7b